Determination of arsenic in silicon matrices by proton activation analysis

Proton activation analysis is applied to the determination of As in high-purity silicon, ion implanted with nominal doses ranging from 1014 to 1016 atoms/cm2. Both instrumental and radiochemical versions have been developed. The75 As(p, n)75Se,75 As(p, 3n)73Se and75 As(p, pn)74 As nuclear reactions have been considered in order to get the best activation conditions for delayed measurements by gamma spectrometry.