Calibration procedure for an optical thickness measurement : a case study

Contributo in Atti di convegno
Data di Pubblicazione:
2002
Citazione:
Calibration procedure for an optical thickness measurement : a case study / S. Spadoni, G. Garatti, D. Lodi, I. Veronese, D. Zappa - In: Proceedings of the international conference on modeling and analysis of semiconductor manufacturing : MASM 2002 : April 10-12, 2002, Wyndham Buttes Resort, Tempe, ArizonaSan Diego : Society for computer simulation international, 2002. - pp. 335-340 (( convegno International conference on modeling and analysis of semiconductor manufacturing : MASM tenutosi a Tempe (Arizona) nel 2002.
Tipologia IRIS:
03 - Contributo in volume
Elenco autori:
S. Spadoni, G. Garatti, D. Lodi, I. Veronese, D. Zappa
Autori di Ateneo:
VERONESE IVAN ( autore )
Link alla scheda completa:
https://air.unimi.it/handle/2434/224555
Titolo del libro:
Proceedings of the international conference on modeling and analysis of semiconductor
manufacturing : MASM 2002 : April 10-12, 2002, Wyndham Buttes Resort, Tempe, Arizona

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