Publication Date:
2005
Citation:
Development of humidity sensors based on nanostructured carbon films / S. Miglio, M. Bruzzi, M. Scaringella, D. Menichelli, E. Leandri, A. Baldi, G. Bongiorno, P. Piseri, P. Milani. - In: SENSORS AND ACTUATORS. B, CHEMICAL. - ISSN 0925-4005. - 111-112(2005), pp. 140-144.
abstract:
Humidity sensors based on cluster assembled nanostructured carbon films in capacitive configuration have been fabricated and characterized.
An electronic read-out system has been designed and implemented in order to measure the complex impedance of the device under operation.
The sensor and read-out electronics provide a fully integrated and cost-effective system. Devices under test show a fast dynamic response and
a good sensitivity compared to capacitive commercial systems. A linear response is observed for relative humidity in the range up to 70%.
Hysteresis is practically absent in this range, while for higher values it is at most in the order of 2%.
An electronic read-out system has been designed and implemented in order to measure the complex impedance of the device under operation.
The sensor and read-out electronics provide a fully integrated and cost-effective system. Devices under test show a fast dynamic response and
a good sensitivity compared to capacitive commercial systems. A linear response is observed for relative humidity in the range up to 70%.
Hysteresis is practically absent in this range, while for higher values it is at most in the order of 2%.
IRIS type:
01 - Articolo su periodico
Keywords:
Nanostructured carbon; Supersonic cluster beam deposition; Capacitive humidity sensors.
List of contributors:
S. Miglio, M. Bruzzi, M. Scaringella, D. Menichelli, E. Leandri, A. Baldi, G. Bongiorno, P. Piseri, P. Milani
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