Integrated gas-phase manufacturing of nanostructured particulate films
Contributo in Atti di convegno
Data di Pubblicazione:
2006
Citazione:
Integrated gas-phase manufacturing of nanostructured particulate films / K. Wegner, P. Piseri, G. Bongiorno, S. Vinati, S.E. Pratsinis, P. Milani - In: Technical proceedings of the 2006 NSTI nanotechnology conference and trade show. Volume 1Cambridge (Mass.) : Nano Science and Technology Institute, 2006. - ISBN 0-9767985-6-5. - pp. 322-324 (( convegno NSTI Nanotech : The Nanotechnology conference and trade show tenutosi a Boston (Mass.) nel 2006.
Abstract:
An integrated process for controlled one-step production of nanostructured particulate thin films is presented, combining gas-phase nanoparticle synthesis, aerodynamic particle manipulation, size selection and deposition. Such films find industrial application for instance in fuel cells, supercapacitors, gas sensors or catalytic surfaces. The production process is presented by the example of titania for gas sensors. The effect of process parameters in the different processing stages – nanoparticle formation, size selection, focussing, and deposition – on nanoparticle and product film properties is investigated. Furthermore, it is demonstrated how the use of masks during deposition can even result in gas sensor array manufacturing that can be interfaced with microfabrication of ICs and MEMs.
Tipologia IRIS:
03 - Contributo in volume
Keywords:
Flame synthesis ; thin films ; deposition ; gas sensors ; microfabrication
Elenco autori:
K. Wegner, P. Piseri, G. Bongiorno, S. Vinati, S.E. Pratsinis, P. Milani
Link alla scheda completa:
Titolo del libro:
Technical proceedings of the 2006 NSTI nanotechnology conference and trade show. Volume 1