First study of humidity sensors based on nanostructured carbon films produced by supersonic cluster beam deposition
Articolo
Data di Pubblicazione:
2004
Citazione:
First study of humidity sensors based on nanostructured carbon films produced by supersonic cluster beam deposition / M. Bruzzi, S. Miglio, M. Scaringella, G. Bongiorno, P. Piseri, A. Podestà, P. Milani. - In: SENSORS AND ACTUATORS. B, CHEMICAL. - ISSN 0925-4005. - B100:1-2(2004), pp. 173-176. [10.1016/j.snb.2003.12.046]
Abstract:
We have investigated the feasibility of humidity sensors based on nanostructured carbon (ns-C) films produced by supersonic cluster
beam deposition (SCBD). The ns-C films have been obtained using pure He as the buffer gas in the pulsed microplasma cluster source
(PMCS). Films of different thickness (1–10 m) were deposited on Au contacts: resistive- and capacitive-type devices were manufactured.
Resistive sensor show a flat response for relative humidity (%RH) up to 60%. Preliminary measurements performed on capacitive-type
devices at room temperature in the relative humidity range 10–70% showed a linear dependence of the capacitance on RH%. Fast rise times
and a sensitivity of the order of 0.1–0.5 pF/%RH favourably compare with standard commercial sensors and other advanced capacitive
devices made with polymers.
Tipologia IRIS:
01 - Articolo su periodico
Keywords:
Humidity sensors; Nanostructured carbon; Supersonic cluster beam deposition
Elenco autori:
M. Bruzzi, S. Miglio, M. Scaringella, G. Bongiorno, P. Piseri, A. Podestà, P. Milani
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