High-rate production of functional nanostructured films and devices by coupling flame spray pyrolysis with supersonic expansion
Articolo
Data di Pubblicazione:
2012
Citazione:
High-rate production of functional nanostructured films and devices by coupling flame spray pyrolysis with supersonic expansion / K. Wegner, S. Vinati, P.G.C. Piseri, A. Antonini, A. Zelioli, E. Barborini, C. Ducati, P. Milani. - In: NANOTECHNOLOGY. - ISSN 0957-4484. - 23:18(2012), pp. 185603.185603.1-185603.185603.12.
Abstract:
The fabrication of functional thin films and devices by direct deposition of nanoparticles from
the gas phase is a promising approach enabling, for instance, the integration of complex
analytical and sensing capabilities on microfabricated platforms. Aerosol-based techniques
ensure large-scale nanoparticle production and they are potentially suited for this goal.
However, they are not adequate in terms of fine control over the lateral resolution of the
coatings, mild processing conditions (avoiding high temperature and aggressive chemicals),
low contamination and compatibility with microfabrication processes.
Here we report the high-rate and efficient production of functional nanostructured films
by nanoparticle assembling obtained by the combination of flame spray pyrolysis and
supersonic expansion. Our approach merges the advantages of flame spray pyrolysis for bulk
nanopowders such as process stability and wide material library availability with those of
supersonic cluster beam deposition in terms of lateral resolution and of direct integration of
nanomaterials on devices. We efficiently produced nanostructured films and devices (such as
gas sensors) using metal oxide, pure noble metal and oxide-supported noble metal
nanoparticles.
Tipologia IRIS:
01 - Articolo su periodico
Elenco autori:
K. Wegner, S. Vinati, P.G.C. Piseri, A. Antonini, A. Zelioli, E. Barborini, C. Ducati, P. Milani
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